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With the development of emerging information technologies such as biomedicine, artificial intelligence, Internet of Things, and 5G networks, traditional manufacturing will be further transformed and upgraded with the help of new technologies. MEMS semiconductor sensor chips play a central role in the era of intelligent Internet of Things. The intelligent sensor industry has become the key to promoting the transformation and upgrading of traditional industries. This has great strategic significance for the economic development and industrial structure optimization of the Guangdong-Hong Kong-Macao Greater Bay Area and even my country.

In 2020, the 6-inch MEMS semiconductor sensor chip production line of Guangzhou ASAIR Electronics Co., Ltd. was officially put into operation. It successfully produced temperature and humidity, flow, gas, differential pressure, wind speed and other sensor chips, and provided MEMS semiconductor chip generation for some Pearl River Delta customers. Service. The completion and commissioning of this production line marks that ASAIR Electronics has become a leading MEMS semiconductor sensor chip production base in South China, and has laid a good foundation for promoting the high-quality development of MEMS semiconductor sensors in China, especially in the Guangdong-Hong Kong-Macao Greater Bay Area.
 

ASAIR Electronics has invested huge sums of money to build a MEMS semiconductor chip production line. The total area of the first-phase project purification workshop is about 2500 square meters, equipped with wet cleaning area, 100-level cleanliness lithography area, 1,000-level cleanliness coating area, and 1,000-level cleanliness engraving area. Corrosion area, 1000-level cleanliness ion implantation area and visiting passages, etc. A number of high-performance air shower systems have been installed throughout the clean room to thoroughly dust off employees or goods entering the clean room.

The first phase of the production line was established in March 2019 and officially entered the construction phase in June 2019. After 6 months of construction, the infrastructure of the production line has been installed. In 2020, multiple stepping projection lithography machines, double-sided lithography machines, glue developing machines, deep silicon etching machines, large beam ion implanters, PECVD, LPCVD, oxidation furnaces, magnetron sputtering machines, probes Advanced automatic production equipment such as needle table, stress tester, and fully automatic RCA cleaning machine were moved in, and the production line was officially put into operation.

The first phase of ASAIR Electronics' MEMS semiconductor production line is a 500nm MEMS semiconductor process, and the production equipment accounts for about 70% of the entire investment scale. The first phase of the project has successfully produced a variety of high-quality chip products such as temperature and humidity sensors, air quality sensors, gas sensors, flow sensors, and differential pressure sensors. According to the plan, the second phase of 2021 will build a 350nm process MEMS semiconductor production line; the third phase of 2022 will build a 180nm process MEMS semiconductor production line; after the total project is completed and put into production, the monthly tape-out scale will reach 40,000 pieces , To meet ASAIR Electronics' own needs and the foundry needs of various MEMS semiconductor chips in the Guangdong-Hong Kong-Macao Greater Bay Area.

With the advent of the Internet of Things era, the Pearl River Delta Economic Zone, as one of China's most important manufacturing bases, has been at the forefront of the times. After the implementation of the "Guangdong-Hong Kong-Macao Greater Bay Area Development Plan Outline" policy, Guangzhou, as the capital city and economic center of Guangdong Province, the main node city of the Belt and Road New Asia-Europe Continental Economic Corridor and the strategic fulcrum of maritime cooperation, has continuously improved its dominant position. Based in Guangzhou, ASAIR Electronics has broken the monopoly of foreign companies in the field of MEMS semiconductor sensors, realized domestic substitution of imports, bravely shouldered the historical mission, and contributed to the construction of the Guangdong-Hong Kong-Macao Greater Bay Area.