1.Product Overview
The AGP21 series is a high-precision capacitive thin film vacuum gauge using Inconel material, resistant to corrosive process media, with high accuracy, fast response time, and long-term stability to meet the needs of today's critical process control applications.
The AGP21 series supports the switching of [Pa], [Torr] and [mbar] 3 common units, and is equipped with a standard KF16 pressure interface. Different adapters can be selected according to needs to ensure easy docking with various equipment and systems.
The accuracy, repeatability, response time and other indicators of AGP21 series are strictly tested before leaving the factory.
2.Application Scope
The AGP21 series is used in semiconductor, photovoltaic, petrochemical, vacuum sterilization, vacuum packaging, vacuum drying and other industries, especially for processes critical to the measurement requirements of low vacuum pressure, such as PECVD/ALD coating process, plasma etching and other processes.
3.Product Feature
• Multiple ranges 0~1, 0~10, 0~100, 0~1000Torr
• High accuracy
• Modbus RTU/0~10V output
• Long-term stability and reliability
• TFT-LCD Dislay
• Anti-corrosion
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